Newsgroups: sci.physics.plasma
From: bwood@beta.lanl.gov (Blake P. Wood)
Organization: Los Alamos National Laboratory
Subject: Re: Dusty plasmas

In article <2vu35r$i52@mojo.eng.umd.edu> doniger@cimd20.cam (Ken Doniger)
writes:
>I am interested in particulate formation in plasma-using semiconductor
>processing equipment (etchers, sputterers). Can anyone suggest recent
>journals or a book?

IEEE Transactions on Plasma Science had a special issue on "Charged
Dust in Plasmas" in April 1994, Vol. 22, Num. 2. Check it out.

- Blake

Blake P. Wood bpw@ctxsys.lanl.gov
Physics Div., MS-E526, Los Alamos Nat'l Lab, Los Alamos NM 87545
phone: (505) 665-6524 Fax: (505) 665-3552