Newsgroups: sci.physics.plasma
From: groover@netcom.com (Robert Groover)
Organization: NETCOM On-line Communication Services (408 261-4700 guest)
Subject: Re: Dusty plasmas

doniger@cimd20.cam (Ken Doniger) writes:
>I am interested in particulate formation in plasma-using semiconductor
>processing equipment (etchers, sputterers). Can anyone suggest recent
>journals or a book?

I believe there is a journal dedicated to particulate management in SC
processing, though I can't remember the exact title - J. Particulate
Control or some such.
Also, the patent literature in this area contains a great deal of
discussion of particulates.

Robert Groover
groover@netcom.com
patents@attmail.com
214-490-5335