Newsgroups: sci.physics.plasma
From news@engin.umich.edu Thu Jan 26 17:33:21 1995
From: semih@methane.engin.umich.edu (semih karabay)
Organization: University of Michigan Engineering, Ann Arbor
Subject: RF POWER GENERATOR

I am trying to find a RF POWER GENERATOR @ 13.56 Mhz with the
following specs.
500 Watts
preferably with serial (RS 232/RS 485) interface
pulsable with modulation frequency 10 Hz- 5 Khz
should contain its waveform generator

This pulsable power supply is going to be used for Plasma Enhanced
Chemical Vapor Deposition (PECVD) of silicon.

I have contacted RFPP and Kurt. J. Lesker but their products does not
satisfy all of the specs. above .

I will be glad if someone can point to a company, possibly in
Japan or Europe..

Semih
semih@engin.umich.edu