Message-ID: <3412007E.9C5@ibm.net>
Date: Sat, 06 Sep 1997 21:16:46 -0400
From: "A. Grill" <grilla@ibm.net>
Reply-To: grilla@ibm.net
Newsgroups: sci.physics.plasma
Subject: Book on Plasma Processing


Learn the latest techniques for plasma assisted processing and
understand the phenomena...

COLD PLASMA IN MATERIALS FABRICATION
>From Fundamentals to Applications
by Alfred Grill, IBM Research Division, T. J. Watson Research Center

IEEE PRESS March 1994 Hardcover 272 pp
IEEE Order No. PC0409-3-PZE ISBN 0-7803-1055-1

Cold plasma research and development activities, as well as its
applications in materials processing have grown enormously in the past
decade. The book, COLD PLASMA IN MATERIALS FABRICATION fills the void
left by other books that cover either the fundamentals of cold, low
pressure plasmas or their applications. COLD PLASMA IN MATERIALS
FABRICATION is a comprehensive, up-to-date treatment of all aspects of
cold, low-pressure plasmas. It thoroughly examines the fundamental
physics and chemistry of cold plasma, it's generation, characterization,
and utilization for advanced applications.

Keeping pace with this emerging technology, the book includes the
following key features:
o Comprehensive treatment of the main parameters and classifications of
different types of plasma
o Extensive coverage of reactions within cold plasmas and between cold
plasmas and solid surfaces
o Invaluable information on state-of-the-art methods for generation and
diagnostics of cold plasmas
o Indispensable material covering the application of cold plasmas for
processing materials

An in-depth and practical guide, COLD PLASMA IN MATERIALS FABRICATION
will provide you with a solid understanding of the field. This
invaluable reference tool provides a helpful bibliography with
suggestions for further reading on each subject.

This book will be of particular interest to manufacturing engineers and
scientists, as well as advanced students in engineering, materials,
physics, and chemistry programs.
..........................................................................................................
Partial Table of Contents: PREFACE; LIST OF SYMBOLS; FUNDAMENTALS OF
PLASMA: Introduction; Definition of Plasma; Plasma Parameters;
Conditions for Plasma Existence; Diffusion of Charged Particles in
Plasma; Plasma Types; Questions; References; COLD PLASMA GENERATION: DC
Glow Discharges; Radio Frequency Discharges; Microwave Plasmas; Electron
Cyclotron Resonance Plasmas; Questions; References; PLASMA CHEMISTRY:
Introduction; Definitions of Terms; Chemical Reactions; The Chemical
Reaction Chain; Plasma Surface Interactions; Questions; References;
PLASMA REACTORS: Plasma Systems; DC Reactors; RF Reactors; Microwave
Reactors; ECR Reactors; Magnetically Enhanced Reactors; Remote PECVD
Reactors; Reactor Clusters; Questions; References; DIAGNOSTICS; Mass
Spectrometry; Electrostatic Probes; Optical Methods; Questions;
References; COLD PLASMA PROCESSES FOR SURFACE MODIFICATION:
Introduction; Surface Modification of Polymers; Surface Cleaning and
Ashing; Oxidation; Surface Hardening; Questions; References; DEPOSITION
OF COATINGS BY PECVD: Deposition of Organic Films; Deposition of
Inorganic Films; Questions; References; PLASMA ASSISTED ETCHING:
Introduction; Plasma Etching; Reactive Ion Etching; Etching of Specific
Materials; Etching Induced Damage; Questions; References; INDEX; ABOUT
THE AUTHOR
..........................................................................................................
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