Date: Mon, 29 Sep 1997 22:19:55 -0400
From: A Grill <grilla@ibm.net>
Subject: book on cold plasma
Newsgroups: sci.physics.plasma
Organization: IBM





Learn the latest techniques for plasma assisted processing and
understand the phenomena...

COLD PLASMA IN MATERIALS FABRICATION
From Fundamentals to Applications
by Alfred Grill, IBM Research Division, T. J. Watson Research
Center

IEEE PRESS March 1994 Hardcover 272 pp
IEEE Order No. PC0409-3-PZE ISBN 0-7803-1055-1

Cold plasma research and development activities, as well as its
applications in materials processing have grown enormously in
the past
decade. The book, COLD PLASMA IN MATERIALS FABRICATION fills the
void
left by other books that cover either the fundamentals of cold,
low
pressure plasmas or their applications. COLD PLASMA IN MATERIALS
FABRICATION is a comprehensive, up-to-date treatment of all
aspects of
cold, low-pressure plasmas. It thoroughly examines the
fundamental
physics and chemistry of cold plasma, it's generation,
characterization,
and utilization for advanced applications.

Keeping pace with this emerging technology, the book includes
the
following key features:
o Comprehensive treatment of the main parameters and
classifications of
different types of plasma
o Extensive coverage of reactions within cold plasmas and
between cold
plasmas and solid surfaces
o Invaluable information on state-of-the-art methods for
generation and
diagnostics of cold plasmas
o Indispensable material covering the application of cold
plasmas for
processing materials

An in-depth and practical guide, COLD PLASMA IN MATERIALS
FABRICATION
will provide you with a solid understanding of the field. This
invaluable reference tool provides a helpful bibliography with
suggestions for further reading on each subject.

This book will be of particular interest to manufacturing
engineers and
scientists, as well as advanced students in engineering,
materials,
physics, and chemistry programs.
.........................................................................................................
Partial Table of Contents: PREFACE; LIST OF SYMBOLS;
FUNDAMENTALS OF
PLASMA: Introduction; Definition of Plasma; Plasma Parameters;
Conditions for Plasma Existence; Diffusion of Charged Particles
in
Plasma; Plasma Types; Questions; References; COLD PLASMA
GENERATION: DC
Glow Discharges; Radio Frequency Discharges; Microwave Plasmas;
Electron
Cyclotron Resonance Plasmas; Questions; References; PLASMA
CHEMISTRY:
Introduction; Definitions of Terms; Chemical Reactions; The
Chemical
Reaction Chain; Plasma Surface Interactions; Questions;
References;
PLASMA REACTORS: Plasma Systems; DC Reactors; RF Reactors;
Microwave
Reactors; ECR Reactors; Magnetically Enhanced Reactors; Remote
PECVD
Reactors; Reactor Clusters; Questions; References; DIAGNOSTICS;
Mass
Spectrometry; Electrostatic Probes; Optical Methods; Questions;
References; COLD PLASMA PROCESSES FOR SURFACE MODIFICATION:
Introduction; Surface Modification of Polymers; Surface Cleaning
and
Ashing; Oxidation; Surface Hardening; Questions; References;
DEPOSITION
OF COATINGS BY PECVD: Deposition of Organic Films; Deposition of
Inorganic Films; Questions; References; PLASMA ASSISTED ETCHING:
Introduction; Plasma Etching; Reactive Ion Etching; Etching of
Specific
Materials; Etching Induced Damage; Questions; References; INDEX;
ABOUT
THE AUTHOR
.........................................................................................................
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