From:
Mike Cristoforo <casetech@tiac.com>
Newsgroups:
sci.physics.plasma
Subject: plasma polymerization
Date: Mon, 05 Jan
1998 06:04:22 -0800
Organization: Case Technology
Message-ID:
<34B0E866.3396@tiac.com>
Reply-To: casetech@tiac.com
Hi,
I'm
designing an ion source for use in a plasma polymerization on a coarse
powder
experiment. I was thinking of using a magnetic energy filter on
the exit
of the source to control the diffusion of the plasma into the
process
chamber. I was wondering if the energy filter is necessary and if
anyone
has information on any similar experiments they would like to
share.
Thanks
in advance.
Regards,
Mike Cristoforo