From: ONETREE@chollian.dacom.co.kr (Chollian Newsgroup User)
Subject: [Q] Thin film(BP) removal.
Newsgroups: sci.physics.plasma,sci.optics
Lines: 25
Message-ID: <iFig1.1259$77.4300552@newssw>
Date: Fri, 12 Jun 1998 23:16:30 GMT
Organization: Dacom



I was trying to etch out thin film on germanium.
I do not know what materials were coated on.

And I guessed the materials of thin films must be BP(boron
phosphide), DLC(diamondlike carbon) or both since that
germanium had been used as the window of themal image device.
I mean the thin film was for hard-coating as well as
anti-reflection in infrared region.

I want to remove thin film without polishing. I can remove
the film using plasma etching if the film was DLC.
The film was not completely removed by plasma etching.

If the film was BP or any other material useds as hard coating
and anti-reflection, how can I remove the film?

Or if you know about the chemical, mechanical or physical
properties of BP, please inform me.

Thanks in advance.

onetree@chollian.net