From: Phil Baumeister <baum-nospam@sonic.net>
Newsgroups: sci.physics.plasma,sci.optics
Subject: Re: [Q] Thin film(BP) removal.
Date: 15 Jun 1998 00:54:49 GMT
Organization: Sonic,Santa Rosa CA,http://www.sonic.net
Lines: 39
Message-ID: <6m1rcp$1rn$2@ultra.sonic.net>
References: <iFig1.1259$77.4300552@newssw>



ONETREE@chollian.dacom.co.kr (Chollian Newsgroup User) wrote:
>
>
>I was trying to etch out thin film on germanium.
>I do not know what materials were coated on.
>
>And I guessed the materials of thin films must be BP(boron
>phosphide), DLC(diamondlike carbon) or both since that
>germanium had been used as the window of themal image device.
>I mean the thin film was for hard-coating as well as
>anti-reflection in infrared region.
>
>I want to remove thin film without polishing. I can remove
>the film using plasma etching if the film was DLC.
>The film was not completely removed by plasma etching.
>
>If the film was BP or any other material useds as hard coating
>and anti-reflection, how can I remove the film?
>
>Or if you know about the chemical, mechanical or physical
>properties of BP, please inform me.
>
>Thanks in advance.
>
>onetree@chollian.net
>

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if the film is DLC, it should be absorbing
at shorter wavelengths. if it is DLC,
did you have any oxygen in your plasma asher?
also, DLC is essentially an organic that
should be attacked by hot chromic. please
please take safety measures with this material.

phil baumeister