From:
"Joe Rongen" <joerongen@whisp.com>
Subject: Re:
[Q]Matching box
Newsgroups: sci.physics.plasma
Organization: ?
>º¯°æ¹®
<kmbyun@bomun.kaist.ac.kr> wrote:
>
>>>If u used to
make use of RF plasma before, u may
>>>know the RF matching box.
To my knowledge, RF
>>>matching box is needed to transmit the
maximum
>>>power from RF power supply to the plasma system.
>>>
>>>In
RF matching box, the two capacitance controllers
>>>can be seen.
What are the roles of them?? Can u
>>>explain easily for
me?
>>>
>>>I'll wait for ur good answers. Thank you
very much.
>
>Roughly speaking, the RF matching box keeps the
plasma
>energized and in resonance as if it was a stable tuned
load.
>Due to the varying nature of the conductivity of plasma...it
is
>not a simple matter to keep this RF load at a preset point.
>Feedback
is usually applied to compensate for the plasma's
>instabilities. The
feedback capacitor, the coupling / blocking
>capacitor(s) and the tank
/ tuning coil(s) might be build right
>into the RF matching box. This
is most likely what you saw in
>the RF box. I would recommend the ARLL
handbook for further
>general info. Most libraries carry a copy.
>
>All
the best Joe
>
>BTW, it is not wise to use RF in a ferrous type
vacuum chamber!
>
>
>
>
>
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