From:
Merle Hirsh <plasma@frontiernet.net>
Newsgroups:
sci.physics.plasma
Subject: Re: [Q]Matching box
Organization: Plasma
Resources
References: <72hlp6$238$1@jupiter.cs.uml.edu>
Reply-To:
plasma@frontiernet.net
This is a multi-part message in MIME
format.
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º¯°æ¹®
wrote:
>
> If u used to make use of RF plasma before, u
may
> know the RF matching box. To my knowledge, RF
> matching
box is needed to transmit the maximum
> power from RF power supply to
the plasma system.
>
> In RF matching box, the two capacitance
controllers
> can be seen. What are the roles of them?? Can u
>
explain easily for me?
>
> I'll wait for ur good answers.
Thank you very much.
Hello, ¯°æ¹®,
To get good power
transfer between a generator and a load, the impedance
of the load must be
the complex conjugate of the impedance of the power
supply. The output of all power supplies are
designed to have a real
output impedance of 50 ohms; the plasma impedance
is complex, because it
includes a conductive (real) contribution from the
body of the plasma
plus the capacitance of the sheaths at the
electrodes. One also would
like to
have a blocking capacitor in series with the plasma, to allow
the driven
electrode ("cathode") to develop a dc bias. So we design a
filter as shown in the attachment: C2
provides the cdc decoupling, and
we adjust the total impedance to match
that of the plasma. We can get
complete
coverage of the needed impedance range by varying any two of
the three
elements; variable capacitors make more sence than trying to
get a
varioable inductance.
I hope this helps; e-mail me if you have any
questions.
Merle Hirsh,
Plasma Resources
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