Date:
16 Feb 1999 07:45:59 GMT
Newsgroups: sci.physics.plasma
Organization:
AOL http://www.aol.com
References:
<7aak44$u4p$1@jupiter.cs.uml.edu>
From: tibbyetc@aol.com
(TibbyEtc)
Subject: plasma CVD
See:
Plasma-Assisted
chemical Vapor Deposition Processes, Bachmann, PK; Gartner, G;
Lydtin, H,
MRS Bulletin 1988.