Date: 16 Feb 1999 07:45:59 GMT
Newsgroups: sci.physics.plasma
Organization: AOL http://www.aol.com
References: <7aak44$u4p$1@jupiter.cs.uml.edu>
From: tibbyetc@aol.com (TibbyEtc)
Subject: plasma CVD



See:

Plasma-Assisted chemical Vapor Deposition Processes, Bachmann, PK; Gartner, G;
Lydtin, H, MRS Bulletin 1988.