From: notworthjoestime@hotmail.com (joe g.)
Newsgroups: sci.physics.plasma
Subject: History of Plasma CVD
Date: 28 Feb 2004 10:41:39 -0800
Organization: http://groups.google.com


Hello, I am a graduate student writing a brief overview of PECVD, and
one of the sections I need to focus on is the history of PECVD. I
would appreciate any help in directing me to a text or website that
provides a history of the development of PECVD. Thanks for any help.
Blessings.
Joe Gardner


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