From: "PJ" <atmospheric88_plasma88@hotmail88.com>
Newsgroups: sci.physics.plasma
Subject: Atmospheric pressure plasma spectral ID software???
Organization: chaos
Date: Wed, 12 May 2004 16:09:07 GMT


Hello,

I am a graduate student working with atmospheric pressure plasma discharges
and would like some suggestions for software packages to help interpret the
resulting spectra. I am using an Ocean Optics four-channel spectrometer
covering 190nm to 1100nm at a resolution of 0.5nm. I am collecting spectra
from an atmospheric pressure dielectric barrier discharge between 2 parallel
quartz plates. The plasma chamber is also constructed of quartz... I
typically run helium, nitrogen, argon, and oxygen plasmas. I am starting to
do some work in deposition and etching. As a start I will be putting down
SiOx films using HMDSO as my Si containing monomer. Etching experiments
will be done on photoresist and other polymeric surfaces.



Here are the characteristics of my dream software program:



Recognizes and Labels significant atomic peaks

Recognizes and Labels significant molecular bands

Has a database in the 190nm to 1100nm range. Ideally for atmospheric
pressure...

Allows an input of reasonable atomic species to look for (assuming that I
know there are only 5 or 6 elements in the system so I don't get erroneous
peaks from plutonium telluride or something weird like that)

Detects optical bremsstrahlung background and calculates plasma temperature
and other plasma paramters.

Does peak deconvolution in areas of overlapping peaks

3-d graphing capability to show trends in the spectra as a function of time,
frequency, power level, etc...



I think about the software that typically ships with new EDS systems on SEM'
s... You click a button and it labels all the X-ray peaks with best guesses
and possible alternatives...



I know there are some programs that will do a few of the above operations.
One that did most or all would be very nice. To date I have been using the
NIST published spectra to manually identify atomic peaks. Some molecular
peaks have been identified using research papers. A good, easily
searchable, database would be very helpful too. I have been using Origin to
do the graphing and automatic peak detection of atomic lines...

Any help or suggestions would be greatly appreciated!

Thanks,

PJ

atmospheric88_plasma88@hotmail88.com

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